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Technical report

05/2022

SEMI 2021 presentation

Challenges in advanced contaminant management from materials science perspective

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Hiroyuki Hamada

Senior scientist,
Product R&D development dep.,
Chemicals div., Daikin Industries, Ltd.

At the SEMI 2021 conference, Mr.Hiroyuki Hamada, Senior scientist, Product R&D development dep., Chemicals div., Daikin Industries, Ltd., gave a lecture on the challenges of advanced pollutant management in the production process of semiconductor device manufacturing equipment from the perspective of materials science.

Contents

- Overview of the lifecycle of PFA in fluid handling
- Classification of contamination in wafer fabrication
- Metal contamination
- Particle contamination
- Conclusion/End remarks

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