Chemical supply equipment
In semiconductor manufacturing processes, fluorine-based materials are used to control contamination of ultra-high-purity chemicals and improve the durability of the manufacturing equipment.
Piping, Tubes, Fittings, Valves, Pumps
Required characteristics
- Stress crack resistance
- Chemical resistance
- High cleanliness
Daikin Solutions
Daikin’s Fluoropolymer NEOFLON PFA AP-Series has the chemical resistance of fluoro materials, along with excellent stress crack resistance and a high level of cleanliness. This allows NEOFLON PFA to achieve a long life and high reliability necessary for piping and tube fittings.
Daikin’s Fluoropolymer NEOFLON PCTFE M-Series is excellent for mechanical strength and cleanliness, making it the best choice for wet applications using high-purity chemicals.
Chemical storage tanks, Filter housings, Portable containers
Required characteristics
- Chemical resistance
- Low chemical permeability
- High cleanliness
Daikin Solutions
These fluoro materials exhibit high reliability as lining equipment:
- Daikin’s Fluoropolymers NEW POLYFLON PTFE, POLYFLON PTFE, and NEOFLON PFA are used as lining sheet materials.
- Daikin’s Fluoropolymers NEOFLON PFA and NEOFLON ETFE are widely used as materials for powder lining in semiconductor manufacturing equipment and chemical transport containers.
High barrier tubes
Required characteristics
- Chemical resistance
- Low chemical permeability
- Gas barrier properties
- High cleanliness
Daikin Solutions
Daikin’s Fluoropolymer NEOFLON CPT LP series has excellent low chemical permeability and gas barrier properties. When used in tubing, the permeation of chemicals and gas is greatly reduced, effectively minimizing any adverse impact on peripheral devices. In addition, tube deterioration is suppressed, and increased durability leads to a longer device life.
